Answers are grounded in this paper and cite their sources.
3D metrology faces increasing demands for higher precision and larger space-bandwidth-speed product (number of 3D points/s). In this paper we consider structured-illumination microscopy as a means for satisfying these demands, developing a theoretical model of the signal formation for both optically smooth and optically rough surfaces. The model allows us to investigate physical limits on precision and to establish rules that allow sensor parameter optimization for greatest precision or highest speed.
No takes yet. Share an insight, caveat, or question.
Yang et al. (2015) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: