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January 25, 1999Applied Physics Letters

Near-field photolithography with a solid immersion lens

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Authors

LGLucien P. GhislainBeckman Coulter FoundationVEVirgil B. ElingsUniversity of Southern CaliforniaKCKenneth B. CrozierAustralian Research Council

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Ghislain et al. (1999) studied this question.

synapsesocial.com/papers/6a90dcf3fae915895c360987https://doi.org/10.1063/1.123168
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