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December 25, 1995Applied Physics Letters

Near-field direct-write ultraviolet lithography and shear force microscopic studies of the lithographic process

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ISIgor I. SmolyaninovOracle (United States)DMD.L. MazzoniUniversity of Maryland, College ParkCDChristophér C. DavisUniversity of Maryland, College Park

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Smolyaninov et al. (1995) studied this question.

synapsesocial.com/papers/6a93cdd62d62bfe4abfc1353https://doi.org/10.1063/1.115297
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