Two-dimensional modeling of a micro-cell plasma in Xe driven by high frequency

Two-dimensional simulation of a micro-cell plasma driven by high frequency at 13.56 MHz is described in Xe. The minimum sustaining voltage (V/sub s/)/sub min/ in an ideal infinite parallel plates at high frequency is first discussed as a function of both pd and fd (f the applied frequency, d the electrode distance, and p the gas pressure). As decreasing d,(V/sub s/)/sub min/ increases at fixed f, while (V/sub s/)/sub min/ decreases with increasing fd at fixed pd in a high frequency discharge under the condition of a spatial ion trapping. A capability for maintaining a micro-cell plasma is investigated under fd