An InGaAs/InP rib-loaded waveguide pin, photodetector integrated with a microwave coplanar waveguide transmission line on a semi-insulating InP substrate is demonstrated. The detector has a 3 dB frequency response in excess of 20 GHz. The DC responsivity of the waveguide photo-detector remains constant at 0.21 A/W over a range of incident optical powers from 400 μW to 20 mW.
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Williams et al. (1992) studied this question.