Waveguide integrated 1.55 µm photodetectorwith 45 GHz bandwidth

Evanescently coupled, waveguide integrated photodiodes were fabricated on InP. The device design is intended to provide ultrafast photoresponse together with a high responsivity. A 3 dB bandwidth of 45 GHz and 90% internal quantum efficiency is achieved at 1.55 µm wavelength. High-speed operation with linear power response is obtained at power levels as high as 5 mW.