Tunable three-dimensional solid Fabry-Perot etalons fabricated by surface-micromachining

We report on novel tunable three-dimensional solid Fabry-Perot etalons fabricated by the surface-micromachining technique. The Fabry-Perot etalon is monolithically integrated with an on-chip rotation stage for angle tuning. A wavelength tuning range of 45 nm has been achieved at 1.3 μm wavelength for a rotation angle of 70/spl deg/. The optical properties of the polysilicon materials have also been characterized using the etalon as testing vehicles.