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Conformality of Pb ( Zr , Ti ) O3 Films Deposited on Trench Structures Having Submicrometer Diameter and Various Aspect Ratios, Nagai, Atsushi, Minamidate, Jun, Asano, Gouji, Choi, Chel Jong, Cho, Choong-Rae, Park, Youngsoo, Funakubo, Hiroshi
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Nagai et al. (2006) studied this question.
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