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January 15, 1984Journal of Applied Physics

Control of lateral epitaxial chemical vapor deposition of silicon over insulators

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DBD.R. BradburyHewlett-Packard (United States)TKT. I. KaminsStanford UniversityCTChun‐Wen TsaoNational Yang Ming Chiao Tung University

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Bradbury et al. (1984) studied this question.

synapsesocial.com/papers/6a913ef81ff55ae0aec654abhttps://doi.org/10.1063/1.333057
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