Layers of yttria‐stabilized zirconia with different yttria content were prepared using MOCVD. The variation of the crystallographic parameters of the cell, as well as the residual stress of the deposits have been studied by XRD as a function of yttria content. The maximum value of the stress has been correlated with a deformation of the cell, in the cubic domain, due to an intrinsic structural modification of the crystals.
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Garcia et al. (1997) studied this question.
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