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This letter reports the thermal-mechanical tuning capability of an in-plane comb drive resonator using VO2 phase transition material. By inducing the insulator-to-metal transition (IMT) using a heat conduction method, a shift of approximately 2% was observed. The frequency tuning was attributed to the induced stresses during the IMT. [2022-0200]
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Pastrana et al. (2023) studied this question.
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