Heteroepitaxial Diamond Growth from the Gas Phase: Problems and Prospects (Review)

The current state of research and new approaches to solving the problem of heteroepitaxy of diamond films from the gas phase are considered. The features of diamond growth from the gas phase, the nucleation processes, texturing, and the main fundamental problems and barriers of heteroepitaxy of single-crystal diamond are described. Recent achievements and potentially promising approaches in this area are considered.