High Current and Rectification in Wafer-Level Planar Nanoscale Air Channel Diodes With Heterogeneous Electrodes

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In this study, we address the design and fabrication challenges typically encountered with planar nanoscale air channel diodes (NACDs) by introducing oblique deposition techniques, achieving the first-reported wafer-level planar NACDs with heterogeneous electrodes. By leveraging the work function difference from the heterogeneous electrodes and controlling the cathode-anode height difference as well as tilt angles, we provide a fresh perspective on device design. This approach results in a record output current of 2 mA at 5V for planar NACDs, an ultra-low turn-on voltage of 0.56 V as well as a high rectification ratio exceeding10^4. This research offers a novel approach for realizing planar NACDs and paves the way for their integration into low-power, high-speed, high-frequency electronic applications.