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A double-layered type film of glass/MgO 10 nm/Cr 70 nm/(Fe--Si 50 nm/Cr 10 nm)/sub 5//Fe-Si 50 nm/MgO 5 nm/(FePt 2 nm/Ag 5 nm)/sub 5/ is synthesized on a glass substrate. The epitaxial growth in the film is preserved before and after annealing at 550/spl deg/C for 1 h, resulting in L1/sub 0/ FePt with a [001] texture. The multilayer structure in the soft magnetic underlayer of (Fe--Si/Cr)/sub 5/ contributes to the good epitaxial growth. The film of (FePt/Ag)/sub 5/ shows FePt grains as small as 13 nm in size and a loop slope at coercivity /spl alpha/ as small as 2 after anneal at 550/spl deg/C for 1 h.
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Kang et al. (2003) studied this question.
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