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September 1, 1993Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Thermal desorption of ultraviolet–ozone oxidized Ge(001) for substrate cleaning

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XZX.-J. ZhangInstitute of PhysicsGXG. XueKing's College - North CarolinaAAAnkur AgarwalManipal Academy of Higher Education

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Zhang et al. (1993) studied this question.

synapsesocial.com/papers/6a928fc59da65ccb784a0714https://doi.org/10.1116/1.578606
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