Stylus profiling at high resolution and low force

This paper describes experimental work to improve the lateral resolution of stylus instruments. Our efforts involve (1) use of a fine stylus, (2) low stylus load, (3) high magnification in the lateral direction, and (4) specimens with fine surface structure by which the lateral resolution of stylus instruments could be detected. By using styli with tip widths between 0.05 and 0.15-microm, a stylus load of 0.6-1.2 x 10(-6)-N (0.06-0.12-mgf), and a piezostage for lateral displacement, we detected 0.05-0.15-microm lateral resolution on the surfaces of different kinds of specimens. To get a high lateral resolution, the most important consideration is a fine stylus with small tip size.