CVD diamond films have been used in many high-tech fields with the industrial and scientific developments, while the lagging of the polishing technology for the CVD diamond films has limited their widely applications. This paper presents a high-efficient low-cost wheel-grinding technology for CVD diamond polishing, and the two key techniques of this technology are introduced in detail based on thermo-chemical polishing technology. Furthermore, wheel grinding technology exhibits a promising perspective for the widely application in the diamond films.
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Jin et al. (2007) studied this question.
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