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January 1, 1979Radiation Effects

Implantation temperature measurement using impurity luminescence

Peter Chandler Peter Townsend

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Abstract

This letter reports variations on a technique for estimating the temperature of the irradiated region of an insulating material during ion implantation.

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Chandler et al. (1979) studied this question.

synapsesocial.com/papers/6a92fff27a20b505a3a64676 https://doi.org/10.1080/00337577908226444

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