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June 1, 1998Journal of Micromechanics and Microengineering

Microfabrication of new sensors for scanning probe microscopy

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Authors

WNWilfried NoellnLIGHT (United States)MAMichaël AbrahamTechnische Universität IlmenauWEW. EhrfeldFraunhofer Institute for Microengineering and Microsystems

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Cite This Study

Noell et al. (1998) studied this question.

synapsesocial.com/papers/6a939a69f3532cd145ebbfa9https://doi.org/10.1088/0960-1317/8/2/017
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