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January 1, 1985Japanese Journal of Applied Physics

Ion-Beam Modification of Amorphous WO3 Film and Its Properties as a High-Contrast Inorganic Ion Resist

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NKNobuyoshi KoshidaHosei UniversityOTOsamu TomitaKyoto University

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Koshida et al. (1985) studied this question.

synapsesocial.com/papers/6a93a217b8961b8efcafd74fhttps://doi.org/10.1143/jjap.24.92
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