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April 15, 1983Applied Physics Letters

Heat of crystallization and melting point of amorphous silicon

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Authors

EDE. P. DonovanUniversity of South Carolina UpstateFSF. SpaepenHarvard UniversityDTDavid TurnbullThe University of Queensland

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Implication

Experimental calorimetry reveals a crystallization enthalpy of 11.9 kJ/mol and melting point of 1420 K in amorphous silicon, indicating lower thermodynamic values than previously modeled.

Key Points

  • Determine the heat of crystallization, solid-phase crystal growth velocity, and melting temperature of amorphous silicon.
  • Produced thin amorphous silicon layers via noble gas ion implantation into (100) substrates maintained at 77 K.
  • Evaluated crystallization thermodynamics and structural transitions using differential scanning calorimetry along with Rutherford backscattering and channeling spectrometry.
  • Measured the heat of crystallization (ΔHac) to be 11.9 ± 0.7 kJ/mol, substantially lower than theoretical values scaled from amorphous germanium.
  • Identified a crystal growth velocity governed by v = v0 exp(−2.24 eV/kT), providing a revised melting temperature estimate of 1420 K for amorphous silicon.

Cite This Study

Donovan et al. (1983) studied this question.

synapsesocial.com/papers/6a93b21050daee6a3ee1c81ehttps://doi.org/10.1063/1.94077
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