A novel three-dimensional (3-D) wiring capacitance simulator for VLSI circuits has been developed and successfully used in various applications, including DRAM-design. The simulator, TRICEPS, determines fully automatically 3-D total and coupling capacitances from mask and processing information. A novel simple input format, versatility, fast calculation time, and no need for any user interference make it a useful interactive development tool for dense VLSI circuits.
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Uebbing et al. (1986) studied this question.
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