The spatial uniformity of rf-sputtered amorphous GdCo films has been investigated by electron probe microanalyzer. It has been found that the concentration of oxygen increases from the center of the film toward the edge, while the concentration of metals is constant throughout the film. Study by the polar Kerr effect has revealed that the compensation temperature of the film is lower at the edge than at the center. From these results we conclude that the non-uniformity of the magnetic property of our films arises mainly from the non-uniformity of the oxygen distribution.
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Kobayashi et al. (1980) studied this question.