Slow‐wave high‐Q coplanar striplines in CMOS technology and their RLCG model

Slow‐wave coplanar striplines (S‐CPS) have been implemented in the standard AMS 0.35 μm CMOS technology. Compared to conventional coplanar striplines (CPS), at 20 GHz, the proposed S‐CPS line has more than 675% increase in quality factor, 54% improvement in the attenuation constant and 72% reduction in the electrical length. The RLCG model has also been extracted and the sources of losses have been identified.