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The structure of ferroelectric vacuum deposits has been studied by transmission and scanning electron microscopy, electron and x-ray diffraction methods. The disorder type structure of BaTi03, SrTiO3 stoichiometric films consists of perovskite-like regions 10 to 30 Å in size. A number of processes taking place in vacuum deposits during crystallization have been found: “curing” of structure defects, growth of coherent regions, relaxation of strains, cubic-tetragonal phase transition (for BaTiO3). “Damping” of ferroelectricity in the films of BaTiO3 type can be explained as resulting from structural defects.
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Yu. Ya. Tomashpolsky (1974) studied this question.
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