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November 1, 1975Japanese Journal of Applied PhysicsOpen Access

Theoretical Considerations in Lateral Damage Distribution Formed by Ion-Implantation

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HMHideki MatsumuraHiroshima UniversitySFSeijiro FurukawaTokyo Institute of Technology

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Matsumura et al. (1975) studied this question.

synapsesocial.com/papers/6a94520c51473d1802a0cb2ehttps://doi.org/10.1143/jjap.14.1783
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