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Thin films of PZT have been deposited by an ion beam sputtering technique from a multicomponent target of lead zirconate titanate in an O2 atmosphere. These films were characterized according to composition, crystal structure, and dielectric and ferroelectric properties. The effect of deposition temperature, heat treatment after deposition, and substrate and target material were investigated.
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R. N. Castellano (1980) studied this question.
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