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March 1, 2002Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Comprehensive study of microcrystalline silicon solar cells deposited at high rate using 13.56 MHz plasma-enhanced chemical vapor deposition

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TRT. RoschekTRT. RepmannJMJ. Müller

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Roschek et al. (2002) studied this question.

synapsesocial.com/papers/6a947bfbcff80aed1b3edbdbhttps://doi.org/10.1116/1.1450585
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Also Consider

Synapse has enriched 2 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Optical and transport studies on thin microcrystalline silicon films prepared by very high frequency glow discharge for solar cell applications1997 · 81 citations
  2. 2High Rate Deposition of Microcrystalline Silicon Using Conventional Plasma-Enhanced Chemical Vapor Deposition1998 · 223 citations