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January 1, 2003IEEE Transactions on Microwave Theory and Techniques

Very low-loss distributed X-band and Ka-band MEMS phase shifters using metal-air-metal capacitors

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Authors

JHJoseph S. HaydenLawrence Livermore National LaboratoryGRGabriel M. RebeizUniversity of California, San Diego

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Hayden et al. (2003) studied this question.

synapsesocial.com/papers/6a9514e82273404a50fa5b76https://doi.org/10.1109/tmtt.2002.806520
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