We present a fabricated metal-semiconductor-metal (MSM) photodetector exhibiting an enhanced photocurrent by integrating a nanoscale metallic grating into its contacts. This serves to increase the incident photon flux about the aperture of the device by guiding incident photons as surface plasmon polaritons. High speed time response data shows that the device responsivity may be increased without sacrificing speed. We demonstrate both a photocurrent enhancement and responsivity increase of about 90% at the design wavelength in comparison to otherwise identical MSM photodetectors without integrated nanoscale gratings. The device retains the MSM advantages of simplicity, planarity, and monolithic integrability.
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Shackleford et al. (2009) studied this question.
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