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September 1, 1994Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Spatially resolved optical emission for characterization of a planar radio frequency inductively coupled discharge

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Authors

DBDaniel F. BealeUniversity of Wisconsin SystemAWA. WendtUniversité Paris-SudLML.J. MahoneyUniversity of Wisconsin–Madison

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Beale et al. (1994) studied this question.

synapsesocial.com/papers/6a957720c449400cd7828efbhttps://doi.org/10.1116/1.579103
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