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January 1, 1996Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Measurements of electron temperature, electron density, and neutral density in a radio-frequency inductively coupled plasma

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Authors

THTsukasa HoriOsaka University of EconomicsMBM. BowdenCulham Centre for Fusion EnergyKUKenji UchinoKyushu University

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Hori et al. (1996) studied this question.

synapsesocial.com/papers/6a9577983d7e4fca39b2e732https://doi.org/10.1116/1.579911
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