The influence of the magnetic field on ion impact on the cathode of a sputtering magnetron discharge

Monte Carlo simulations have been used to study the influence of the magnetic field on ion impact at the cathode surface of a sputtering magnetron discharge. The ion parameters (energy, incident angle at the cathode and transit time) have been investigated under four magnetic field strengths and two pressures (1 and 10 Pa). It has been confirmed that the magnetic field has little influence on ion motion. Also, it was found that the magnetic field's influences on ion parameters are given through its influence on electron motion, namely on the ionization site, which is most important in determining the ion energy and transit time. It is proposed that, taking into consideration both the ion energy and the transit time, the appropriate ionization site is the edge of the cathode fall region.