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November 1, 1990Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Laser-induced fluorescence characterization of ions in a magnetron plasma

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Authors

MGMatthew GoecknerWest Virginia UniversityJGJ. GoreeUniversity of IowaTST. E. SheridanOhio Northern University

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Goeckner et al. (1990) studied this question.

synapsesocial.com/papers/6a958ddbaa92d0f3572ca734https://doi.org/10.1116/1.576421
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