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Millimetre-wave slow wave electrodes on InP are realised by capacitively loading of coplanar waveguide (CPW) transmission lines using interdigitated metal-semiconductor-metal (MSM) structures. The slow wave structures are designed for velocity matching with InP-based optical waveguides and a 50 Ω line impedance. Their dispersion, loss and impedance characteristics are measured up to 40 GHz, and they demonstrate the suitability of the lines for use in distributed MSM photodetectors.
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Böttcher et al. (1996) studied this question.
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