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November 1, 1981Journal of Vacuum Science and Technology

FET fabrication using maskless ion implantation

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Authors

RKR. L. KubenaHRL Laboratories (United States)CAC. L. AndersonMichigan Technological UniversityRSR. L. SeligerKempten University of Applied Sciences

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Kubena et al. (1981) studied this question.

synapsesocial.com/papers/6a95a324904fbd6dd88d617ahttps://doi.org/10.1116/1.571189
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