Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
December 1, 2001Japanese Journal of Applied PhysicsOpen Access

Electron Energy Distributions in Inductively Coupled Plasma of Argon

View Full Paper
Ask AI
Bookmark
Share

Authors

SYShigeru YonemuraNippon Steel (Japan)KNKenichi NanbuTohoku University

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Yonemura et al. (2001) studied this question.

synapsesocial.com/papers/6a95a9deb467049bdb8d620dhttps://doi.org/10.1143/jjap.40.7052
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Electron temperature control with grid bias in inductively coupled argon plasma1999 · 72 citations
  2. 2Langmuir probe measurements in an inductively coupled plasma source1997 · 125 citations
  3. 3Comparison of electron property measurements in an inductively coupled plasma made by Langmuir probe and laser Thomson scattering techniques1999 · 35 citations
  4. 4Momentum relaxation of a charged particle by small-angle Coulomb collisions1997 · 24 citations
  5. 5A Study of the Sustaining Mechanism in an Inductively Coupled Plasma1994 · 13 citations