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July 1, 1994Japanese Journal of Applied Physics

A Study of the Sustaining Mechanism in an Inductively Coupled Plasma

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Authors

KKKenji Kond Kenji KondHKHidehiko KurodaTMToshiaki MakabeKeio University

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Cite This Study

Kond et al. (1994) studied this question.

synapsesocial.com/papers/6a8a6286f8670bac6e33737bhttps://doi.org/10.1143/jjap.33.4254
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