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March 1, 1997Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topicsOpen Access

Langmuir probe measurements in an inductively coupled plasma source

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Authors

ASA. SchwabedissenQ-Cells (Germany)EBEric C. BenckNational Institute of Standards and TechnologyJRJames R. RobertsMedical University of South Carolina

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Schwabedissen et al. (1997) studied this question.

synapsesocial.com/papers/6a89aac6ea82e62cf6fd4ccehttps://doi.org/10.1103/physreve.55.3450
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