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March 1, 1984Japanese Journal of Applied Physics

Pd–Ni–Si–Be–B Liquid Metal Ion Source for Maskless Ion Implantation

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Authors

HAHiroshi ArimotoNational Institute of Advanced Industrial Science and TechnologyATAkira TakamoriInstitute for Laser TechnologyEMEizo MiyauchiFujitsu (Japan)

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Arimoto et al. (1984) studied this question.

synapsesocial.com/papers/6a95b1e454b0eb02e36287c1https://doi.org/10.1143/jjap.23.l165
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  5. 5Liquid metal alloy ion sources for B, Sb, and Si1981 · 63 citations