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November 1, 1981Journal of Vacuum Science and Technology

Liquid metal alloy ion sources for B, Sb, and Si

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Authors

KGK. GamoFujitsu (Japan)TUTakeshi UkegawaThe University of OsakaYIY. InomotoNEC (Japan)

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Cite This Study

Gamo et al. (1981) studied this question.

synapsesocial.com/papers/6a9ce6223a657474307be889https://doi.org/10.1116/1.571239
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