KrF Laser-Triggered SF6 Spark Gap for Low Jitter Timing

KrF laser-triggered spark gaps exploit the high dc-dielectric strength and low ultraviolet (UV) breakdown threshold of SF6 gas. Detailed measurements using a dc-charged pulser demonstrate subnanosecond jitter for switching a 0.5-cm gap operated at 80 kV with 7 mJ in 20 ns of 248-nm KrF radiation. A 200-kV pulse-charged 0.7-cm gap gives similar performance.