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November 1, 1996Japanese Journal of Applied PhysicsOpen Access

Analysis of Sheath Electric Fields in a Radio-Frequency Discharge in Helium

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Authors

YCYoung Wook ChoiMBMark Bowden Mark BowdenKMKatsunori MuraokaKyushu University

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Choi et al. (1996) studied this question.

synapsesocial.com/papers/6a95c3cd9b19f368482bee67https://doi.org/10.1143/jjap.35.l1459
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