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April 1, 1994Journal of Applied Physics

Mechanism of leakage current through the nanoscale SiO2 layer

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Authors

SNSeido NaganoRitsumeikan UniversityMTMasaru TsukijiKAK. AndoRenesas Electronics (Japan)

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Cite This Study

Nagano et al. (1994) studied this question.

synapsesocial.com/papers/6a96835823945b2448822dc5https://doi.org/10.1063/1.356116
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