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October 15, 1981Applied Physics Letters

Grain growth of polycrystalline silicon films on SiO2 by cw scanning electron beam annealing

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Authors

KSKenji ShibataYokosuka City MuseumTITomoyasu InoueHitachi (Japan)TTTadahiro TakigawaToshiba (Japan)

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Shibata et al. (1981) studied this question.

synapsesocial.com/papers/6a968d0e1f16343146bb8151https://doi.org/10.1063/1.92839
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