The effects of UV irradiation on the properties of gel films prepared from Zr- n-butoxides modified with acetylacetone (AcAc) have been studied. The irradiation with UV light corresponding to the π-π* transition in the chelate ring of AcAc was found to dissociate the chelate bonds in the gel films and simultaneously decrease the solubility of these gel films in acidic solutions. This finding was applied to the patterning of ZrO2 thin films; a gel film was irradiated through a mask, leached in an acidic solution, and heat-treated. Through the process above, finely patterned ZrO2 films were fabricated on various substrates.
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Shinmou et al. (1994) studied this question.
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