The rate of change of uv photoemission spectroscopy (UPS) spectral features accompanying formation of the monohydride phase on Si(110)5×1 has been measured as a function of H2 pressure and W filament temperature in a thermal activation source. It is shown that an equilibrium thermodynamic calculation can reproduce the observed rates only if the adsorbing species produced at the hot filaments is atomic H and not vibrationally excited H2*. An approximate calculation of absolute rates makes sense only if the sticking probability of atomic hydrogen on clean, room‐temperature Si (110) 5×1 is near unity.
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Сакурай et al. (1977) studied this question.