Three‐dimensional analysis of high voltage electron microscope tilt images: Methods and problems

A quantification program for obtaining three‐dimensional image information from high voltage electron microscope stereo pair pictures was developed for a Luzex 5000 image analyzer. A zero tilt image was used as a reference. A real‐time image processor system was introduced to improve the image quality and to reduce the beam damage of the specimens. Some modifications of the optical system and the specimen stage were made to improve the accuracy and efficiency of stereoscopy. The accuracy of the measurement was considerably improved by these modifications. Some basic problems and limitations of the method are discussed.