Influence of Underlayer Materials on Preferred Orientations of Sputter-Deposited AlN/Mo Bilayers for Film Bulk Acoustic Wave Resonators, Matsumoto, Hisanori, Asai, Kengo, Kobayashi, Nobuyasu, Nagashima, Shiro, Isobe, Atsushi, Shibagaki, Nobuhiko, Hikita, Mitsutaka
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Matsumoto et al. (2004) studied this question.
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