Lattice location of Ca in GaN using ion channeling

The Ca dopant site in the GaN lattice has been investigated using ion channeling. Metal organic chemical vapor deposition grown GaN on c-plane sapphire substrates implanted with Ca40 at a dose of 1×1015 cm−2 with postimplant annealing were studied. Our results indicate that more than 80% of Ca are near Ga sites even in as-implanted samples, however, they are displaced by ∼0.2 Å from the Ga sites and that the Ca goes to the exact Ga sites after annealing at 1100 °C while the annealing did not change the apparent fraction of substitutional Ca. We suggest that the displaced Ca in the as-implanted sample are electrically compensated due to formation of complex defects with donor-like point defects and that CaGa becomes electrically active when these complex defects are broken and the point defects diffuse away with annealing at 1100 °C.